Micro/nano replication [electronic resource] : processes and applications / Shinill Kang.

By: Contributor(s): Material type: TextTextPublication details: Hoboken, N.J. : Wiley, c2012.Description: xv, 367 p. : illSubject(s): Genre/Form: DDC classification:
  • 620/.5 23
LOC classification:
  • T174.7 .K36 2012eb
Online resources:
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Includes index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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