Chemical vapor deposition [electronic resource] / edited by Jong-Hee Park, T.S. Sudarshan.

Contributor(s): Material type: TextTextSeries: Surface engineering series ; v. 2.Publication details: Materials Park, Ohio : ASM International, 2001.Description: vii, 481 p. : illSubject(s): Genre/Form: DDC classification:
  • 671.7/35 21
LOC classification:
  • TS695 .C52 2001eb
Online resources:
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Includes bibliographical references.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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