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	1.	Introduction to microelectromechanical microwave systems [electronic resource] / Héctor J. de los Santos. by Santos, Héctor J. de los ebrary, Inc Series: Microelectromechanical systems series Edition: 2nd ed. Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boston : Artech House, c2004 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Add to cart (remove)
	2.	An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams. by Maluf, Nadim Williams, Kirt ebrary, Inc Series: Microelectromechanical systems series Edition: 2nd ed. Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boston : Artech House, 2004 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Add to cart (remove)
	3.	Fundamentals and applications of microfluidics [electronic resource] / Nam-Trung Nguyen, Steven T. Wereley. by Nguyen, Nam-Trung, 1970- Wereley, Steven T ebrary, Inc Series: Microelectromechanical systems series Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boston, MA : Artech House, c2002 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Add to cart (remove)
	4.	MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al. by Beeby, Stephen ebrary, Inc Series: Microelectromechanical systems series Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boston : Artech House, c2004 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Add to cart (remove)
	5.	Organic and inorganic nanostructures [electronic resource] / Alexei Nabok. by Nabok, Alexei ebrary, Inc Series: Microelectromechanical systems series \| Nanotechnology series Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boston : Artech House, c2005 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Add to cart (remove)