Your search returned 4 results.

Results
	1.	Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack. by Mack, Chris A ebrary, Inc Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Save to lists Add to cart (remove)
	2.	Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce. by Ma, Xu, 1983- Arce, Gonzalo R ebrary, Inc Series: Wiley series in pure and applied optics Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Oxford : Wiley-Blackwell, 2010 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Save to lists Add to cart (remove)
	3.	Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor. by Hennessy, Theodore C ebrary, Inc Series: Engineering tools, techniques and tables \| Nanotechnology science and technology series Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: New York : Nova Science, c2011 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Save to lists Add to cart (remove)
	4.	Lithography [electronic resource] : main techniques / edited by Stefan Landis. by Landis, Stefan ebrary, Inc Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: London : Hoboken, N.J. : ISTE ; Wiley, 2011 Online resources: An electronic book accessible through the World Wide Web; click to view Availability: No items available. Save to lists Add to cart (remove)