| 000 | 01405nam a2200361Ia 4500 | ||
|---|---|---|---|
| 001 | 0000119487 | ||
| 005 | 20171002060348.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 090710s2010 ne a sb 001 0 eng d | ||
| 020 | _z9780815515944 (hbk.) | ||
| 020 | _z0815515944 (hbk.) | ||
| 035 | _a(CaPaEBR)ebr10378866 | ||
| 035 | _a(OCoLC)667288128 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7875 _b.H36 2010eb |
| 245 | 0 | 0 |
_aHandbook of silicon based MEMS materials and technologies _h[electronic resource] / _cVeikko Lindroos ... [et al.]. |
| 250 | _a1st ed. | ||
| 260 |
_aAmsterdam ; _aBoston : _bWilliam Andrew/Elsevier, _c2010. |
||
| 300 |
_axxxii, 636 p. : _bill. |
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| 490 | 1 | _aMicro & nano technologies | |
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2011. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials. |
|
| 650 | 0 |
_aSilicon _xElectric properties. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aLindroos, Veikko. | |
| 710 | 2 | _aebrary, Inc. | |
| 830 | 0 | _aMicro & nano technologies. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/daystar/Doc?id=10378866 _zAn electronic book accessible through the World Wide Web; click to view |
| 908 | _a170314 | ||
| 942 | 0 | 0 | _cEB |
| 999 |
_c108636 _d108636 |
||