| 000 | 01187nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | 0000124383 | ||
| 005 | 20171002060641.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 100823s2010 ne a sbf 001 0 eng d | ||
| 020 | _z9780815520375 | ||
| 020 | _z9780080946580 (e-book) | ||
| 035 | _a(CaPaEBR)ebr10408179 | ||
| 035 | _a(OCoLC)680619801 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTS695 _b.M38 2010eb |
| 100 | 1 | _aMattox, D. M. | |
| 245 | 1 | 0 |
_aHandbook of physical vapor deposition (PVD) processing _h[electronic resource] / _cDonald M. Mattox. |
| 250 | _a2nd ed. | ||
| 260 |
_aAmsterdam : _bElsevier, _c2010. |
||
| 300 |
_axlvi, 746 p. : _bill. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2010. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 |
_aPhysical vapor deposition _vHandbooks, manuals, etc. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/daystar/Doc?id=10408179 _zAn electronic book accessible through the World Wide Web; click to view |
| 908 | _a170314 | ||
| 942 | 0 | 0 | _cEB |
| 999 |
_c113532 _d113532 |
||