| 000 | 01275nam a2200349Ia 4500 | ||
|---|---|---|---|
| 001 | 0000126091 | ||
| 005 | 20171002060742.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 100317s2010 enka s 001 0 eng d | ||
| 010 | _z 2010010076 | ||
| 020 | _z9780470749838 (cloth) | ||
| 035 | _a(CaPaEBR)ebr10419414 | ||
| 035 | _a(OCoLC)689995003 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7875 _b.F73 2010eb |
| 082 | 0 | 4 |
_a621.381 _222 |
| 100 | 1 | _aFranssila, Sami. | |
| 245 | 1 | 0 |
_aIntroduction to microfabrication _h[electronic resource] / _cSami Franssila. |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester, West Sussex, England ; _aHoboken, NJ : _bJohn Wiley & Sons, _c2010. |
||
| 300 |
_axiv, 518 p. : _bill. |
||
| 500 | _aIncludes index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2010. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aElectronic apparatus and appliances. | |
| 650 | 0 | _aMicrofabrication. | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/daystar/Doc?id=10419414 _zAn electronic book accessible through the World Wide Web; click to view |
| 908 | _a170314 | ||
| 942 | 0 | 0 | _cEB |
| 999 |
_c115240 _d115240 |
||