| 000 | 02789nam a2200553 a 4500 | ||
|---|---|---|---|
| 001 | 0000157181 | ||
| 005 | 20171002062734.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 120510s2011 sz a sb 101 0 eng d | ||
| 010 | _z 2012405162 | ||
| 020 | _z9780878492176 (pbk.) | ||
| 020 | _z0878492178 (pbk.) | ||
| 020 | _z9780878492176 | ||
| 020 | _z9783038134817 (e-book) | ||
| 035 | _a(CaPaEBR)ebr10604228 | ||
| 035 | _a(OCoLC)815479009 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7871.15.S55 _bI585 2009eb |
| 082 | 0 | 4 |
_a621.381 _223 |
| 111 | 2 |
_aInternational Symposium on Silicon Science _n(5th : _d2009 : _cKiryū-shi, Japan) |
|
| 245 | 1 | 0 |
_aSilicon science and advanced micro-device engineering I _h[electronic resource] : _bselected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / _cedited by Osamu Hanaizumi and Masafumi Unno. |
| 246 | 3 | 0 | _a5th International Symposium on Silicon Science |
| 246 | 3 | _aFifth International Symposium on Silicon Science | |
| 246 | 3 | 0 | _aInternational Symposium on Silicon Science |
| 246 | 3 | 0 | _a1st International Conference on Advanced Micro-Device Engineering |
| 246 | 3 | _aFirst International Conference on Advanced Micro-Device Engineering | |
| 246 | 3 | 0 | _aInternational Conference on Advanced Micro-Device Engineering |
| 246 | 3 | 0 | _aISSS & AMDE 2009 |
| 246 | 1 | 3 | _aISSS 2009 |
| 246 | 3 | 0 | _aAMDE 2009 |
| 260 |
_aStafa-Zurich ; _aEnfield, N.H. : _bTrans Tech Publications, _c2011. |
||
| 300 |
_axii, 282 p. : _bill. |
||
| 440 | 0 |
_aKey engineering materials, _x1013-9826 ; _vv. 459 |
|
| 504 | _aIncludes bibliographical references and indexes. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2011. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 |
_aSilicon _vCongresses. |
|
| 650 | 0 |
_aNanostructures _vCongresses. |
|
| 650 | 0 |
_aMicroelectronics _vCongresses. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aHanaizumi, Osamu. | |
| 700 | 1 | _aUnno, Masafumi. | |
| 710 | 2 |
_aGunma Daigaku. _bInternational Education and Research Center for Silicon Science. |
|
| 710 | 2 |
_aGunma Daigaku. _bAdvanced Technology Research Center. |
|
| 710 | 2 | _aebrary, Inc. | |
| 711 | 2 |
_aInternational Conference on Advanced Micro-Device Engineering _n(1st : _d2009 : _cKiryū-shi, Japan) |
|
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/daystar/Doc?id=10604228 _zAn electronic book accessible through the World Wide Web; click to view |
| 908 | _a170314 | ||
| 942 | 0 | 0 | _cEB |
| 999 |
_c146329 _d146329 |
||