000			01351nam a2200349 a 4500
001			0000162823
005			20171002063110.0
006			m o u
007			cr cn|||||||||
008			121019s2013 njua sb 001 0 eng d
010			_z 2012952185
020			_z9781848213678
020			_z9781118579039 (e-book)
035			_a(CaPaEBR)ebr10653885
035			_a(OCoLC)828735211
040			_aCaPaEBR _cCaPaEBR
050	1	4	_aQH212.T7 _bT73 2013eb
245	0	0	_aTransmission electron microscopy in micro-nanoelectronics _h[electronic resource] / _cedited by Alain Claverie.
260			_aHoboken, N.J. : _bJohn Wiley &Sons, Inc., ; _aLondon : _bISTE, _c2013.
300			_axiii, 243 p. : _bill.
490	0		_aNanoscience and nanotechnology series
504			_aIncludes bibliographical references and index.
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2015. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aTransmission electron microscopy.
650		0	_aNanoelectronics.
650		0	_aNanotechnology.
655		7	_aElectronic books. _2local
700	1		_aClaverie, A. _q(Alain)
710	2		_aebrary, Inc.
856	4	0	_uhttp://site.ebrary.com/lib/daystar/Doc?id=10653885 _zAn electronic book accessible through the World Wide Web; click to view
908			_a170314
942	0	0	_cEB
999			_c151969 _d151969