000			01532nam a2200397Ia 4500
001			0000163843
005			20171002063149.0
006			m u
007			cr cn|||||||||
008			100820s2011 nyua sb 001 0 eng d
010			_z 2010033078
020			_z1617618373 (hardcover)
020			_z9781611221237
020			_z9781617618376 (hardcover)
035			_a(CaPaEBR)ebr10659070
035			_a(OCoLC)726745731
040			_aCaPaEBR _cCaPaEBR
050	1	4	_aTK7872.M3 _bL58 2011eb
082	0	4	_a621.3815/31 _222
245	0	0	_aLithography _h[electronic resource] : _bprinciples, processes and materials / _cTheodore C. Hennessy, editor.
260			_aNew York : _bNova Science, _cc2011.
300			_axii, 284 p. : _bill. (some col.).
490	1		_aEngineering tools, techniques and tables
490	1		_aNanotechnology science and technology
504			_aIncludes bibliographical references and index.
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aMicrolithography.
650		0	_aMicrofabrication.
655		7	_aElectronic books. _2local
700	1		_aHennessy, Theodore C.
710	2		_aebrary, Inc.
830		0	_aEngineering tools, techniques and tables.
830		0	_aNanotechnology science and technology series.
856	4	0	_uhttp://site.ebrary.com/lib/daystar/Doc?id=10659070 _zAn electronic book accessible through the World Wide Web; click to view
908			_a170314
942	0	0	_cEB
999			_c152989 _d152989