| 000 | 01704nam a2200409 i 4500 | ||
|---|---|---|---|
| 001 | EBC3328156 | ||
| 003 | MiAaPQ | ||
| 005 | 20250214125529.0 | ||
| 006 | m o d | | ||
| 007 | cr cnu|||||||| | ||
| 008 | 141022t20142014sw a ob 000 0 eng d | ||
| 020 | _a9789175192130 (e-book) | ||
| 035 | _a(MiAaPQ)EBC3328156 | ||
| 035 | _a(Au-PeEL)EBL3328156 | ||
| 035 | _a(CaPaEBR)ebr10953561 | ||
| 035 | _a(OCoLC)896833600 | ||
| 040 |
_aMiAaPQ _beng _erda _epn _cMiAaPQ _dMiAaPQ |
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| 050 | 4 |
_aTK7871.15.S56 _b.Y393 2014 |
|
| 082 | 0 |
_a546.6832 _223 |
|
| 100 | 1 |
_aYazdanfar, Milan, _eauthor. |
|
| 245 | 1 | 0 |
_aPrecursors and defect control for halogenated CVD of thick SiC epitaxial layers / _cMilan Yazdanfar. |
| 264 | 1 |
_aLinkoping, Sweden : _bLinkoping University, _c2014. |
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| 264 | 4 | _c2014 | |
| 300 |
_a1 online resource (63 pages) : _billustrations. |
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| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 490 | 1 |
_aLinkoping Studies in Science and Technology Dissertations, _x0345-7524 ; _vNumber 1625 |
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| 504 | _aIncludes bibliographical references. | ||
| 588 | _aDescription based on online resource; title from PDF title page (ebrary, viewed October 22, 2014). | ||
| 590 | _aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 |
_aSilicon carbide _xResearch. |
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| 655 | 4 | _aElectronic books. | |
| 797 | 2 | _aProQuest (Firm) | |
| 830 | 0 |
_aLinkoping studies in science and technology. _pDissertations ; _vNumber 1625. |
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| 856 | 4 | 0 |
_uhttp://ebookcentral.proquest.com/lib/daystar-ebooks/detail.action?docID=3328156 _zClick to View |
| 999 |
_c242600 _d242599 |
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