| 000 | 01583nam a2200325Ia 4500 | ||
|---|---|---|---|
| 001 | 0000071624 | ||
| 005 | 20171002053547.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 971103s1997 dcua sb 000 0 eng d | ||
| 010 | _z 97080865 | ||
| 020 | _z0585002509 (electronic bk.) | ||
| 035 | _a(CaPaEBR)ebr10055038 | ||
| 035 | _a(OCoLC)53011051 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7874 _b.N333 1997eb |
| 082 | 0 | 4 |
_a621.381 _221 |
| 110 | 2 |
_aNational Research Council (U.S.). _bCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. |
|
| 245 | 1 | 0 |
_aMicroelectromechanical systems _h[electronic resource] : _badvanced materials and fabrication methods / _cCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| 260 |
_aWashington, DC : _bNational Academy Press, _c1997. |
||
| 300 |
_axiv, 61 p. : _bill. |
||
| 504 | _aIncludes bibliographical references (p. 51-55). | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 |
_aMicroelectronics _xMaterials. |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/daystar/Doc?id=10055038 _zAn electronic book accessible through the World Wide Web; click to view |
| 908 | _a170314 | ||
| 942 | 0 | 0 | _cEB |
| 999 |
_c60782 _d60782 |
||