| 000 | 01304nam a2200337Ia 4500 | ||
|---|---|---|---|
| 001 | 0000096121 | ||
| 005 | 20171002054941.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 060906s2006 enka sb 000 0 eng d | ||
| 020 | _z9781860946240 | ||
| 020 | _z9781860949098 | ||
| 020 | _z1860946240 | ||
| 035 | _a(CaPaEBR)ebr10201168 | ||
| 035 | _a(OCoLC)560445767 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7875 _b.S55 2006eb |
| 245 | 0 | 0 |
_aSilicon carbide micro electromechanical systems for harsh environments _h[electronic resource] / _ceditor Rebecca Cheung. |
| 246 | 3 | _aSilicon carbide microelectromechanical systems for harsh environments | |
| 260 |
_aLondon : _bImperial College Press, _cc2006. |
||
| 300 |
_ax, 181 p. : _bill. |
||
| 504 | _aIncludes bibliographical references. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aSilicon carbide. | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aCheung, Rebecca. | |
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/daystar/Doc?id=10201168 _zAn electronic book accessible through the World Wide Web; click to view |
| 908 | _a170314 | ||
| 942 | 0 | 0 | _cEB |
| 999 |
_c85275 _d85275 |
||