000			01345nam a2200349Ia 4500
001			0000096461
005			20171002054952.0
006			m u
007			cr cn|||||||||
008			970619s1998 caua sbf 001 0 eng d
010			_z 97026269
020			_z9780123520654
020			_z0123520657 (alk. paper)
035			_a(CaPaEBR)ebr10201808
035			_a(OCoLC)162128757
040			_aCaPaEBR _cCaPaEBR
050	1	4	_aTJ940 _b.H59 1998eb
245	0	0	_aHandbook of vacuum science and technology _h[electronic resource] / _cedited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
260			_aSan Diego, CA : _bAcademic Press, _cc1998.
300			_axxii, 835 p. : _bill.
504			_aIncludes bibliographical references and index.
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aVacuum technology _vHandbooks, manuals, etc.
650		0	_aMechanical engineering.
655		7	_aElectronic books. _2local
700	1		_aHoffman, Dorothy M., _dd. 1996.
700	1		_aSingh, Bawa.
700	1		_aThomas, John H.
710	2		_aebrary, Inc.
856	4	0	_uhttp://site.ebrary.com/lib/daystar/Doc?id=10201808 _zAn electronic book accessible through the World Wide Web; click to view
908			_a170314
942	0	0	_cEB
999			_c85615 _d85615