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Microelectronics failure analysis desk reference / [electronic resource] : edited by Richard J. Ross. - 6th ed. - Materials Park, Ohio : ASM International, c2011. - xi, 660 p. : ill.

Includes bibliographical references and indexes.

section 1. Introduction -- section 2. Failure analysis process overviews -- section 3. Failure analysis topics -- section 4. Fault verification and classification -- section 5. Localization techniques -- section 6. Deprocessing and sample preparation -- section 7. Inspection -- section 8. Materials analysis -- section 9. Focused ion beam applications -- section 10. Management and reference information.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.

ISBN:

LCCN:

Subjects--Topical Terms:
Electronics--Materials--Testing--Handbooks, manuals, etc.
Microelectronics--Materials--Testing--Handbooks, manuals, etc.
Microelectronics--Materials--Defects--Handbooks, manuals, etc.
Electronic apparatus and appliances--Testing--Handbooks, manuals, etc.
Semiconductors--Defects--Handbooks, manuals, etc.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7871 / .M52 2011eb

Dewey Class. No.: 621.381