Low-k nanoporous interdielectrics
Ree, Moonhor.
Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties / [electronic resource] : Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo. - Hauppauge, N.Y. : Nova Science Publishers, c2010. - 67 p. : ill. - Nanotechnology science and technology . - Nanotechnology science and technology series. .
Includes bibliographical references (p. [51]-61) and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Dielectric films.
Microelectronics--Materials.
Porous materials.
Interconnects (Integrated circuit technology)
Electronic books.
TK7871.15.F5 / R44 2010eb
621.381
Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties / [electronic resource] : Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo. - Hauppauge, N.Y. : Nova Science Publishers, c2010. - 67 p. : ill. - Nanotechnology science and technology . - Nanotechnology science and technology series. .
Includes bibliographical references (p. [51]-61) and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Dielectric films.
Microelectronics--Materials.
Porous materials.
Interconnects (Integrated circuit technology)
Electronic books.
TK7871.15.F5 / R44 2010eb
621.381