Low-k nanoporous interdielectrics (Record no. 155281)

MARC details
000 -LEADER
fixed length control field 01620nam a2200409 a 4500
001 - CONTROL NUMBER
control field 0000166136
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20171002063316.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field m u
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cn|||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100506s2010 nyuad sb 001 0 eng d
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
Canceled/invalid LC control number 2010016713
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 9781616687496 (softcover)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 9781617283185 (e-book)
035 ## - SYSTEM CONTROL NUMBER
System control number (CaPaEBR)ebr10675006
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)711000608
040 ## - CATALOGING SOURCE
Original cataloging agency CaPaEBR
Transcribing agency CaPaEBR
050 14 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7871.15.F5
Item number R44 2010eb
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
Edition number 22
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Ree, Moonhor.
245 10 - TITLE STATEMENT
Title Low-k nanoporous interdielectrics
Medium [electronic resource] :
Remainder of title materials, thin film fabrications, structures and properties /
Statement of responsibility, etc. Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Hauppauge, N.Y. :
Name of publisher, distributor, etc. Nova Science Publishers,
Date of publication, distribution, etc. c2010.
300 ## - PHYSICAL DESCRIPTION
Extent 67 p. :
Other physical details ill.
490 1# - SERIES STATEMENT
Series statement Nanotechnology science and technology
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references (p. [51]-61) and index.
533 ## - REPRODUCTION NOTE
Type of reproduction Electronic reproduction.
Place of reproduction Palo Alto, Calif. :
Agency responsible for reproduction ebrary,
Date of reproduction 2013.
Note about reproduction Available via World Wide Web.
-- Access may be limited to ebrary affiliated libraries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Dielectric films.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectronics
General subdivision Materials.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Porous materials.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Interconnects (Integrated circuit technology)
655 #7 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
Source of term local
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Yoon, Jinhwan.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Heo, Kyuyoung.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element ebrary, Inc.
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title Nanotechnology science and technology series.
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://site.ebrary.com/lib/daystar/Doc?id=10675006">http://site.ebrary.com/lib/daystar/Doc?id=10675006</a>
Public note An electronic book accessible through the World Wide Web; click to view
908 ## - PUT COMMAND PARAMETER (RLIN)
Put command parameter 170314
942 00 - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Electronic Book

No items available.