Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /

Yazdanfar, Milan,

Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / Milan Yazdanfar. - 1 online resource (63 pages) : illustrations. - Linkoping Studies in Science and Technology Dissertations, Number 1625 0345-7524 ; . - Linkoping studies in science and technology. Dissertations ; Number 1625. .

Includes bibliographical references.

9789175192130 (e-book)


Silicon carbide--Research.


Electronic books.

TK7871.15.S56 / .Y393 2014

546.6832