Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / Milan Yazdanfar.

By: Material type: TextTextSeries: Linkoping studies in science and technology. Dissertations ; ; Number 1625.Publisher: Linkoping, Sweden : Linkoping University, 2014Copyright date: 2014Description: 1 online resource (63 pages) : illustrationsContent type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9789175192130 (e-book)
Subject(s): Genre/Form: DDC classification:
  • 546.6832 23
LOC classification:
  • TK7871.15.S56 .Y393 2014
Online resources:
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Includes bibliographical references.

Description based on online resource; title from PDF title page (ebrary, viewed October 22, 2014).

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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