Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].

Contributor(s): Material type: TextTextSeries: Micro & nano technologiesPublication details: Amsterdam ; Boston : William Andrew/Elsevier, 2010.Edition: 1st edDescription: xxxii, 636 p. : illSubject(s): Genre/Form: LOC classification:
  • TK7875 .H36 2010eb
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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