Micro-manufacturing engineering and technology [electronic resource] / edited by Yi Qin.

Contributor(s): Material type: TextTextSeries: Micro & nano technologiesPublication details: Amsterdam : Elsevier, 2010.Edition: 1st edDescription: xiv, 414 p. : illSubject(s): Genre/Form: LOC classification:
  • TS176 .M53 2010eb
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2010. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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