Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.

By: Contributor(s): Material type: TextTextSeries: Key engineering materials ; v. 459Publication details: Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.Description: xii, 282 p. : illOther title:
  • 5th International Symposium on Silicon Science
  • Fifth International Symposium on Silicon Science
  • International Symposium on Silicon Science
  • 1st International Conference on Advanced Micro-Device Engineering
  • First International Conference on Advanced Micro-Device Engineering
  • International Conference on Advanced Micro-Device Engineering
  • ISSS & AMDE 2009
  • ISSS 2009 [Other title]
  • AMDE 2009
Subject(s): Genre/Form: DDC classification:
  • 621.381 23
LOC classification:
  • TK7871.15.S55 I585 2009eb
Online resources:
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Includes bibliographical references and indexes.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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