Silicon carbide micro electromechanical systems for harsh environments [electronic resource] / editor Rebecca Cheung.

Contributor(s): Material type: TextTextPublication details: London : Imperial College Press, c2006.Description: x, 181 p. : illOther title:
  • Silicon carbide microelectromechanical systems for harsh environments
Subject(s): Genre/Form: LOC classification:
  • TK7875 .S55 2006eb
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Includes bibliographical references.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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