Smart mems and sensor systems [electronic resource] / Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro.

By: Contributor(s): Material type: TextTextPublication details: London : Imperial College Press, c2006.Description: xii, 539 p. : illSubject(s): Genre/Form: LOC classification:
  • TK7875 .G38 2006eb
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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