Handbook of 3D integration. Volume 3, 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.

Contributor(s): Material type: TextTextPublisher: Weinheim, Germany : Wiley-VCH, 2014Copyright date: ©2014Description: 1 online resource (475 pages) : illustrations (some color)Content type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9783527670130 (e-book)
  • 9783527670123 (e-book)
  • 9783527670116 (e-book)
  • 9783527670109 (e-book)
Subject(s): Genre/Form: Additional physical formats: Print version:: Handbook of 3D integration. Volume 3, 3D process technology.DDC classification:
  • 621.3815 23
LOC classification:
  • TK7874 .H363 2014eb
Online resources:
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Includes bibliographical references at the end of each chapters and index.

Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014).

Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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