Nanofabrication using focused ion and electron beams [electronic resource] : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Contributor(s): Material type: TextTextSeries: Nanomanufacturing series ; v. 1Publication details: Oxford ; New York : Oxford University Press, 2011.Description: xvi, 813 pSubject(s): Genre/Form: DDC classification:
  • 620.1/15 23
LOC classification:
  • TA418.9.N35 N2525 2011eb
Online resources:
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Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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