An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.

By: Contributor(s): Material type: TextTextSeries: Microelectromechanical systems seriesPublication details: Boston : Artech House, 2004.Edition: 2nd edDescription: xx, 282 p. : illSubject(s): Genre/Form: DDC classification:
  • 621.381 22
LOC classification:
  • TK7875 .M35 2004eb
Online resources:
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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